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TANTALUM ETHYLATE

tantalum(5+) ethanolate

CAS: 6074-84-6

Molecular Formula: C10H25O5Ta

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TANTALUM ETHYLATE - Names and Identifiers

Name tantalum(5+) ethanolate
Synonyms Tantalum ethoxide
TANTAL(V)-ETHOXID
TANTALUM ETHYLATE
TANTALUM ETHOXIDE
Tantalum v ethoxide
TANTALUM(V) ETHOXIDE
TANTALUM PENTAETHOXIDE
tantalum(5+) ethanolate
ethanol,tantalum(5+)salt
tantalum(5+) pentaethanolate
CAS 6074-84-6
EINECS 228-010-2
InChI InChI=1/5C2H6O.Ta/c5*1-2-3;/h5*3H,2H2,1H3

TANTALUM ETHYLATE - Physico-chemical Properties

Molecular FormulaC10H25O5Ta
Molar Mass406.25
Density1.566g/mLat 25°C(lit.)
Melting Point21°C(lit.)
Boling Point155°C0.01mm Hg(lit.)
Flash Point87°F
Water SolubilityDecomposes in water. Soluble in organic solvents.
Solubility Soluble in organic solvents.
Vapor Presure82.8mmHg at 25°C
Appearanceliquid
Specific Gravity1.56
BRN3678999
Storage Condition2-8°C
SensitiveMoisture Sensitive/Air Sensitive
Refractive Indexn20/D 1.487(lit.)
MDLMFCD00049785

TANTALUM ETHYLATE - Risk and Safety

Risk CodesR10 - Flammable
R34 - Causes burns
Safety DescriptionS16 - Keep away from sources of ignition.
S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice.
S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection.
S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.)
UN IDsUN 2920 8/PG 2
WGK Germany3
FLUKA BRAND F CODES3-8-10-21
TSCANo
Hazard Class3
Packing GroupIII

TANTALUM ETHYLATE - Introduction

ethanol tantalum (V) also known as ethanol tantalum, it is an organic raw material, its molecular formula is C10H30O5Ta, molecular weight of 411.2901.

Last Update：2024-04-10 22:29:15

TANTALUM ETHYLATE - Nature

melting point 21°C(lit.)
Density 1.566g/mL at 25°C(lit.)
Refractive index n20/D 1.487(lit.)
Storage Conditions 2-8°C
Sensitivity moiety Sensitive/Air Sensitive
BRN 3678999
CAS DataBase Reference 6074-84-6

Last Update：2024-04-10 22:29:15

TANTALUM ETHYLATE - Reference Information

EPA chemical substance information information provided by: ofmpeb.epa.gov (external link)
Use ethanol tantalum can be used to prepare tantalum oxide or tantalum metal coatings by chemical vapor deposition (CVD); tantalum ethanol hydrolysis followed by heating can also produce tantalum oxide powder, which can produce high purity grade tantalum oxide. Tantalum oxide thin films with high specific area have been produced in the United States using ethanol tantalum as a precursor. The thin films show good optical activity and have potential applications in solar cells and photocatalysts. Ethanol tantalum can be produced by plasma technology, ultrafine tantalum carbide powder. The main application of ethanol tantalum in the surface coating is the preparation of tantalum nitride or tantalum oxide. Because tantalum nitride and tantalum oxide have high dielectric properties and stability, they are mainly used in protective layers and dielectric layers of electronic components. The ethanol tantalum can generate tantalum nitride with a structure of high melting points and micro grains in the circuit board. Such a nitride layer structure can suppress the diffusion of copper in contact with silicon or silicon dioxide in a circuit board. In addition, some studies have pointed out that tantalum nitride can tolerate higher temperatures than other barrier metals without degradation, and therefore tantalum and tantalum nitride, which are precursors of ethanol tantalum, are superior copper process barrier layers.
preparation the production of ethanol tantalum by chloride method is a relatively common method, and the process is relatively mature. Chloride has relatively high requirements for equipment and process. The main reason is that the raw material tantalum pentachloride and the product ethanol tantalum are easy to react with the water vapor in the air. Tantalum pentachloride will release a lot of heat when reacting with ethanol. The diluent and ethanol in the raw materials are flammable and explosive liquids, and the reaction rate must be controlled in the pilot or production. Tantalum pentachloride and ethanol reaction will produce high concentrations of hydrogen chloride, easy to corrode equipment. The diluent in the raw material is aromatic hydrocarbon, which has high toxicity. At present, the relevant units are studying other low toxicity organic solvents instead of aromatic hydrocarbon chlorination synthesis process. The main characteristics of the chlorination method are that the synthesis speed is fast and the equipment input is small. Since the starting material, tantalum chloride, reacts rapidly with ethanol and generates a large amount of heat, an inert diluent must be used to control the reaction rate. The inert diluent mainly uses aromatic hydrocarbons, which poses a certain risk to the health and safety of the operator. Waste materials containing aromatic hydrocarbons are difficult to treat. This method must have sufficient tantalum pentachloride raw material and the relevant safety ring equipment and measures to ensure.
Application The alkoxides of tantalum are mainly tantalum methanol, tantalum ethanol, tantalum propanol, tantalum butanol and tantalum isobutanol. Among them, ethanol tantalum is the most widely used. The alkoxide of tantalum is soluble in most organic materials, so it is an ideal precursor for tantalum oxide. Most of the compounds of tantalum and tantalum are relatively stable. Tantalum metal does not react with ethanol under normal conditions. At present, there are two main methods for the synthesis of ethanol tantalum, one is the chloride method, the other is the "sacrificial" anode method.
Last Update：2024-04-10 22:29:15
TANTALUM ETHYLATE
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Hefei TNJ Chemical Industry Co.,Ltd.
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